| 系列 | 型号 | 工作距离 | 量程(R) | 线性精度 | 分辨率 | 光点直径(S) | 最小可测厚度 | 最大角度(A) | 尺寸 | 重量 |
|---|---|---|---|---|---|---|---|---|---|---|
| D15A12 | D15A12R3S40 | 20.5mm | ±1.5mm | ±0.75μm | 6nm | 40μm | 100μm | ±12° 镜面 | D:15mm L:55.21mm | 12.8±2g |
| D15A12R1S40 | 21.3mm | ±0.75mm | ±0.38μm | 3nm | 50μm | |||||
| D15A12R07S40 | 21.3mm | ±0.375mm | ±0.18μm | 2nm | 25μm | |||||
| D15A12-90 | D15A12R3S40-90 | 7.5mm | ±1.5mm | ±0.75μm | 6nm | 40μm | 100μm | ±12° 镜面 | D:15mm L:69.84mm | 17.0±2g |
| D15A12R1S40-90 | 8.3mm | ±0.75mm | ±0.38μm | 3nm | 50μm | |||||
| D15A12R07S40-90 | 8.3mm | ±0.375mm | ±0.18μm | 2nm | 25μm | |||||
| D15A20 | D15A20R1S13 | 13.8mm | ±0.7mm | ±0.35μm | 4nm | 13μm | 70μm | ±20° 镜面 | D:15mm L:91.96mm | 27.2±2g |
| D15A20R07S13 | 14.2mm | ±0.35mm | ±0.18μm | 2nm | 35μm | |||||
| D15A20R03S13 | 14.2mm | ±0.15mm | ±0.08μm | 1nm | 15μm | |||||
| D15A20-90 | D15A20R1S13-90 | 0.6mm | ±0.7mm | ±0.35μm | 4nm | 13μm | 70μm | ±20° 镜面 | D:15mm L:106.7mm | 32.2±5g |
| D15A20R07S13-90 | 1mm | ±0.35mm | ±0.18μm | 2nm | 35μm | |||||
| D15A20R03S13-90 | 1mm | ±0.15mm | ±0.08μm | 1nm | 15μm | |||||
| D15A20-90B | D15A20R1S13-90B | 13.6mm | ±0.7mm | ±0.35μm | 4nm | 13μm | 70μm | ±20° 镜面 | D:25.4mm L:88.9mm | 50.8±5g |
| D15A20R07S13-90B | 14mm | ±0.35mm | ±0.18μm | 2nm | 35μm | |||||
| D15A20R03S13-90B | 14mm | ±0.15mm | ±0.08μm | 1nm | 15μm | |||||
| D15A32 | D15A32R06S3 | 6mm | ±0.32mm | ±0.16μm | 2nm | 3.5μm | 32μm | ±32° 镜面 | D:15mm L:130.75mm | 38.4±5g |
| D15A32R03S3 | 6.2mm | ±0.16mm | ±0.08μm | 1nm | 16μm | |||||
| D15A32R01S3 | 6.2mm | ±0.08mm | ±0.04μm | 1nm | 8μm |
