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| 系列 | 型号 | 工作距离 | 量程(R) | 线性精度 | 分辨率 | 光点直径(S) | 最小可测厚度 | 最大角度(A) | 尺寸 | 重量 |
|---|---|---|---|---|---|---|---|---|---|---|
| D65A10 | D65A10R60S42 | 148mm | ±30mm | ±9.9μm | 120nm | 42μm | 2000μm | ±10° 镜面 | D:65mm L:132.7mm | 562.4±10g |
| D65A10R30S42 | 163mm | ±15mm | ±5μm | 60nm | 1000μm | |||||
| D65A10R20S42 | 158mm | ±10mm | ±3.3μm | 40nm | 667μm | |||||
| D65A18 | D65A18R23S14 | 70.8mm | ±11.7mm | ±5.8μm | 50nm | 14μm | 780μm | ±18° 镜面 | D:65mm L:230.9mm | 750.4±10g |
| D65A18R11S14 | 76.7mm | ±5.8mm | ±2.9μm | 25nm | 387μm | |||||
| D65A18R5S14 | 76.7mm | ±2.9mm | ±1.5μm | 13nm | 193μm | |||||
| D65A52 | D65A52R3S13 | 15.9mm | ±1.5mm | ±0.75μm | 6nm | 13μm | 100μm | ±52° 镜面 | D:65mm L:263.7mm | 689.0±10g |
| D65A52R1S13 | 16.7mm | ±0.75mm | ±0.38μm | 3nm | 50μm | |||||
| D65A52R07S13 | 16.7mm | ±0.375mm | ±0.19μm | 2nm | 25μm |
